Patent Application
Utility
App. No. 19/331,700
· Confirmation No. 6133
Workpiece Processing Apparatus with Gas Showerhead Assembly
Inventors:
Michael Yang, Yun Yang, Manuel Sohn, Silke Hamm, Alex Wansidler, Dieter Hezler, Rolf Bremensdorfer
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2026-01-16 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2025-10-07 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2025-10-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2025-10-07 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2025-09-17 | IDS.R197.REL |
Letter specifying the conditions for filing under 37 CFR 1.97 | — | View | |
| 2025-09-17 | PA.. |
Power of Attorney | — | View | |
| 2025-09-17 | SPEC |
Specification | 25 | View | |
| 2025-09-17 | CLM |
Claims | 3 | View | |
| 2025-09-17 | ABST |
Abstract | 1 | View | |
| 2025-09-17 | PA.. |
Power of Attorney | 3 | View | |
| 2025-09-17 | 136A |
Authorization for Extension of Time all replies | 1 | View | |
| 2025-09-17 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2025-09-17 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2025-09-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2025-09-17 | OATH |
Oath or Declaration filed | 10 | View | |
| 2025-09-17 | IDS.R197.REL |
Letter specifying the conditions for filing under 37 CFR 1.97 | 3 | View | |
| 2025-09-17 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2025-09-17 | ADS |
Application Data Sheet | 10 | View | |
| 2025-09-17 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2025-09-17 | DRW.SUPP |
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| 2025-09-17 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View |
Inventors
Michael Yang
Palo Alto, CA
Yun Yang
Berwyn, PA
Manuel Sohn
Ulm, GERMANY
Silke Hamm
Laupheim, GERMANY
Alex Wansidler
Blaustein, GERMANY
Dieter Hezler
Lonsee-Halzhausen, GERMANY
Rolf Bremensdorfer
Bibertal, GERMANY
Attorneys & Agents of Record
Classification
USPC
118/724
C23C16/45565
C23C16/481
C23C16/45591
C23C16/4584
C23C16/52
H01J37/3244
H01J37/32724
Prosecution
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
- Customer No.
- 177432
- Docket No.
- AGX-390-DIV
- Confirmation No.
- 6133
Publication
- Pub. No.
- US20260015722A1
- Pub. Date
- 2026-01-15
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 19/331,700
- Filed
- 2025-09-17
- Pub. No.
- US20260015722A1
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
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