IP Library › Patent Application 63129079
Patent Application Provisional
App. No. 63/129,079 · Confirmation No. 2161

Workpiece Processing Apparatus with Gas Showerhead Assembly

Provisional Application Expired
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 Code Description Pages PDF
2021-06-25 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2021-04-12 APP.FILE.REC Filing Receipt 3 View
2020-12-22 PA.. Power of Attorney 3 View
2020-12-22 TR.PROV Provisional Cover Sheet (SB16) 4 View
2020-12-22 ADS Application Data Sheet 10 View
2020-12-22 SPEC Specification 24 View
2020-12-22 CLM Claims 4 View
2020-12-22 ABST Abstract 1 View
2020-12-22 DRW Drawings-only black and white line drawings 13 View
2020-12-22 WFEE Fee Worksheet (SB06) 2 View
2020-12-22 N417 Electronic Filing System Acknowledgment Receipt 3 View
2020-12-22 TRAN.LET Transmittal Letter 1 View
2020-12-22 136A Authorization for Extension of Time all replies 1 View
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Quick Facts
App. No.
63/129,079
Filed
2020-12-22