Patent Assignment
Reel/Frame 055047/0574
Assignment of Assignor's Interest
Recorded: 2021-01-27
Pages: 12
Assignors
SOHN, MANUEL
Executed: 2021-01-26
HAMM, SILKE
Executed: 2021-01-07
WANSIDLER, ALEX
Executed: 2021-01-20
HEZLER, DIETER
Executed: 2021-01-07
BREMENSDORFER, ROLF
Executed: 2021-01-12
Assignee
MATTSON THERMAL PRODUCTS GMBH
DAIMLERSTRASSE 10, DORNSTADT, 89160, GERMANY
Covered Property
(1)
Workpiece Processing Apparatus with Gas Showerhead Assembly
Application:
63/129,079 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 27, 2021
From: YANG, MICHAEL X.; YANG, YUN
To: MATTSON TECHNOLOGIES, INC.
Reel/Frame 055047/0549 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →