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App. No. 19/546,995 · Confirmation No. 5740

PULSED RF PLASMA GENERATOR WITH HIGH DYNAMIC RANGE

Applicant: MKS Inc.
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2026-07-02 NTC.PUB Notice of Publication 1 View
2026-03-25 WFEE Fee Worksheet (SB06) 1 View
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2026-02-23 SPEC Specification 26 View
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Quick Facts
App. No.
19/546,995
Filed
2026-02-23
Pub. No.
US20260188615A1
Art Unit
OPAP