Patent Application
Provisional
App. No. 63/441,616
· Confirmation No. 4449
Pulsed RF Plasma Generator With High Dynamic Range
Applicant:
MKS Instruments, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2024-11-14 | C.AD.PC |
Change of Address via Patent Center | 1 | View | |
| 2023-02-21 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2023-01-27 | PA.. |
Power of Attorney | 2 | View | |
| 2023-01-27 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2023-01-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2023-01-27 | ADS |
Application Data Sheet | 9 | View | |
| 2023-01-27 | SPEC |
Specification | 42 | View | |
| 2023-01-27 | CLM |
Claims | 4 | View | |
| 2023-01-27 | ABST |
Abstract | 1 | View | |
| 2023-01-27 | DRW.NONBW |
Drawings-other than black and white line drawings | 11 | View | |
| 2023-01-27 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2023-01-27 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 202824
- Docket No.
- 3197-000149-US-PS1
- Confirmation No.
- 4449
Child
Claims priority from a provisional application
→
App. 19/546,995
Filed 2026-02-23
· Docketed New Case - Ready for Examination
Child
PCT
Claims priority from a provisional application
→
PCT/US2024/010731
Filed 2024-01-08
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 18/390,694
· US 12,586,759
Filed 2023-12-20
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/441,616
- Filed
- 2023-01-27
External Links