Granted Patent
S1
US 1,072,774 · App. 29/769,610 · Granted Apr 29, 2025
Target profile for a physical vapor deposition chamber target
Inventors:
Shane Lavan (Santa Clara, CA); Madan Kumar Shimoga Mylarappa (Bengaluru, IN); Sundarapandian Ramalinga Vijayalakshmi Reddy (Bangalore, IN); Avinash Nayak (Bangalore, IN); Wei Dou (Sunnyvale, CA); Yong Cao (San Jose, CA); Kirankumar Neelasandra Savandaiah (Bangalore, IN); Mingdong Li (Santa Clara, CA)
Assignee:
APPLIED MATERIALS, INC.
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Claims (1)
The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Feb 16, 2021
From: LAVAN, SHANE; SHIMOGA MYLARAPPA, MADAN KUMAR; REDDY, SUNDARAPANDIAN RAMALINGA VIJAYALAKSHMI; NAYAK, AVINASH; DOU, WEI; CAO, YONG; SAVANDAIAH, KIRANKUMAR NEELASANDRA; LI, MINGDONG
To: APPLIED MATERIALS, INC.
Reel/Frame 055268/0868 →
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