IP Library › Patent Application 60268423
Patent Application Provisional
App. No. 60/268,423 · Confirmation No. 8857

Phosphine plasma treatment of low dielectric constant materials in semiconductor device manufacturing

Provisional Application Expired
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 Code Description Pages PDF
2001-02-14 TRNA Transmittal of New Application 2 View
2001-02-14 SPEC Specification 8 View
2001-02-14 CLM Claims 2 View
2001-02-14 ABST Abstract 1 View
2001-02-14 DRW Drawings-only black and white line drawings 1 View
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Quick Facts
App. No.
60/268,423
Filed
2001-02-14