IP Library › Granted Patent US 6,784,095
Granted Patent Utility
US 6,784,095 · Confirmation No. 2391

PHOSPHINE TREATMENT OF LOW DIELECTRIC CONSTANT MATERIALS IN SEMICONDUCTOR DEVICE MANUFACTURING

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2004-07-19 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-04-19 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-19 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-19 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-04-19 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-19 FWCLM Index of Claims 1 View
2004-04-19 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-01 AP.B Appeal Brief Filed 13 View
2003-10-01 N/AP Notice of Appeal Filed 1 View
2003-07-08 CTFR Final Rejection 11 View
2003-07-08 892 List of references cited by examiner 1 View
2003-06-26 SRNT Examiner's search strategy and results 1 View
2003-05-28 ARTIFACT Artifact sheet indicating an item has been filed which cannot be scanned 1 View
2003-04-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-04-17 SPEC Specification 1 View
2003-04-17 CLM Claims 2 View
2003-04-17 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-04-17 XT/ Extension of Time 1 View
2002-12-17 CTNF Non-Final Rejection 8 View
2002-12-17 1449 List of References cited by applicant and considered by examiner 1 View
2002-12-17 892 List of references cited by examiner 1 View
2002-12-17 NFDR Notice of Formal Drawings Required 3 View
2002-10-31 SRNT Examiner's search strategy and results 2 View
2002-10-18 SRNT Examiner's search strategy and results 1 View
2002-10-09 ELC. Response to Election / Restriction Filed 2 View
2002-09-13 CTRS Requirement for Restriction/Election 4 View
2002-06-27 TRNA Transmittal of New Application 3 View
2002-06-27 OATH Oath or Declaration filed 3 View
2002-06-27 XT/ Extension of Time 1 View
2002-04-04 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-02-12 TRNA Transmittal of New Application 2 View
2002-02-12 SPEC Specification 9 View
2002-02-12 CLM Claims 2 View
2002-02-12 ABST Abstract 1 View
2002-02-12 DRW Drawings-only black and white line drawings 1 View
2002-02-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-02-12 SRFW Search information including classification, databases and other search related notes 1 View
2002-02-12 FWCLM Index of Claims 1 View
2002-02-12 TRNA Transmittal of New Application 2 View
2002-02-12 DRW Drawings-only black and white line drawings 1 View
2002-02-12 SPEC Specification 9 View
2002-02-12 CLM Claims 2 View
2002-02-12 ABST Abstract 1 View
2002-02-12 WFEE Fee Worksheet (SB06) 1 View
2002-02-12 WCLM Claims Worksheet (PTO-2022) 1 View
2002-02-12 FRPR Certified Copy of Foreign Priority Application 1 View
2002-02-12 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
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Quick Facts
Patent No.
US 6,784,095
App. No.
10/073,066
Filed
2002-02-12
Granted
2004-08-31
Art Unit
2813
PTA
-45 days