IP Library Patent Application 60281325
Patent Application Provisional
App. No. 60/281,325 · Confirmation No. 1621

Using double exposure effects during phase shifting to control line end shortening

Provisional Application Expired
⬇ PDF
Code Description Pages PDF
2001-04-03 TRNA Transmittal of New Application 1 View
2001-04-03 SPEC Specification 29 View
2001-04-03 CLM Claims 8 View
2001-04-03 ABST Abstract 1 View
2001-04-03 DRW Drawings-only black and white line drawings 8 View
2001-04-03 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
60/281,325
Filed
2001-04-03