IP Library › Patent Application 60313487
Patent Application Provisional
App. No. 60/313,487 · Confirmation No. 5169

Multiple coherency optimized exposures for printing near 1:1, sub-wavelength pitch features using very high transmission attenuated PSM

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-08-21 TRNA Transmittal of New Application 1 View
2001-08-21 SPEC Specification 6 View
2001-08-21 DRW Drawings-only black and white line drawings 11 View
2001-08-21 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
60/313,487
Filed
2001-08-21