Method for 2D pattern profile calibration and verification with application to model-based optical proximity correction

Inventors: Tom Laidig, Uwe Hollerbach, Xuelong Shi, Armin Liebchen, Ralph Schlief, Sabita Roy, J. Fung Chen

Provisional Application Expired

	Code	Description	Pages	PDF
2001-10-09	`TRNA`	Transmittal of New Application	1	View
2001-10-09	`SPEC`	Specification	2	View
2001-10-09	`DRW`	Drawings-only black and white line drawings	4	View
2001-10-09	`LET.`	Miscellaneous Incoming Letter	1	View

Inventors

Tom Laidig Santa Clara, CA

Uwe Hollerbach Santa Clara, CA

Xuelong Shi Santa Clara, CA

Armin Liebchen Santa Clara, CA

Ralph Schlief Santa Clara, CA

Sabita Roy Santa Clara, CA

J. Fung Chen Santa Clara, CA

Attorneys & Agents of Record

MICHAEL FOGARTY Reg. 36139 Attorney · RIMON

Prosecution

ASML NETHERLANDS B.V.

from ASML MASKTOOLS B.V.

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2014-02-07

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