Patent Application
Provisional
App. No. 60/333,503
· Confirmation No. 8867
Method and apparatus for removing residual assist features
Provisional Application Expired
Inventors
Markus Franciscus Antonius Eurlings
Breda, NETHERLANDS
Jang Fung Chen
Cupertino, CA
Duan-Fu Stephen Hsu
Freemont, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 55071-120
- Confirmation No.
- 8867
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/333,503
- Filed
- 2001-11-28
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