Patent Application
Provisional
App. No. 60/366,537
· Confirmation No. 9011
Method of gate shrink dipole decomposition
Provisional Application Expired
Inventors
Attorneys & Agents of Record
Prosecution
- Docket No.
- 55071-134
- Confirmation No.
- 9011
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/366,537
- Filed
- 2002-03-25
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