IP Library › Patent Application 60394244
Patent Application Provisional
App. No. 60/394,244 · Confirmation No. 3294

Relay lens used in an illumination system of a lithography system

Provisional Application Expired
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 Code Description Pages PDF
2002-07-09 TRNA Transmittal of New Application 4 View
2002-07-09 ADS Application Data Sheet 1 View
2002-07-09 SPEC Specification 6 View
2002-07-09 ABST Abstract 1 View
2002-07-09 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
App. No.
60/394,244
Filed
2002-07-09