IP Library › Patent Application 60396869
Patent Application Provisional Small
App. No. 60/396,869 · Confirmation No. 3413

Electrostatically acutated MEMS apparatus and method having a recessed electrode

Provisional Application Expired
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 Code Description Pages PDF
2002-07-18 TRNA Transmittal of New Application 4 View
2002-07-18 SPEC Specification 5 View
2002-07-18 CLM Claims 4 View
2002-07-18 DRW Drawings-only black and white line drawings 7 View
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Quick Facts
App. No.
60/396,869
Filed
2002-07-18