IP Library › Patent Application 60400680
Patent Application Provisional
App. No. 60/400,680 · Confirmation No. 8317

Method and system for correction of intrinsic birefringence in UV microlithography

Inventor: Harry Sewell
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2002-08-05 TRNA Transmittal of New Application 4 View
2002-08-05 ADS Application Data Sheet 1 View
2002-08-05 SPEC Specification 17 View
2002-08-05 CLM Claims 7 View
2002-08-05 ABST Abstract 1 View
2002-08-05 DRW Drawings-only black and white line drawings 5 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
60/400,680
Filed
2002-08-05