Patent Application
Provisional
App. No. 60/409,599
· Confirmation No. 6807
Method of achieving CD linearity control for full-chip CPL manufacturing
Provisional Application Expired
Inventors
Attorneys & Agents of Record
Prosecution
- Docket No.
- 55071-155
- Confirmation No.
- 6807
Child
PCT
Claims priority from a provisional application
→
PCT/US2003/028387
Filed 2003-09-10
· International Application Withdrawn
Child
Claims priority from a provisional application
→
App. 11/708,029
· US 7,667,216
Filed 2007-02-20
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/659,715
· US 7,211,815
Filed 2003-09-11
· Patented Case
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/409,599
- Filed
- 2002-09-11
External Links