Patent Application
Provisional
App. No. 60/425,323
· Confirmation No. 3860
Model-based layout conversion method for double dipole lithography
Provisional Application Expired
Inventors
Stephen D. Hsu
Santa Clara, CA
Kurt Wampler
Santa Clara, CA
J. Fung Chen
Santa Clara, CA
Noel Corcoran
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 55071-174
- Confirmation No.
- 3860
Child
Claims priority from a provisional application
→
App. 11/588,326
· US 7,666,554
Filed 2006-10-27
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 12/630,280
· US 7,985,515
Filed 2009-12-03
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
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ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/425,323
- Filed
- 2002-11-12
External Links