IP Library › Patent Application 60451235
Patent Application Provisional
App. No. 60/451,235 · Confirmation No. 1203

Method and apparatus of wafer print simulation using hybrid model with mask optical images

Inventor: Linyong Pang
Provisional Application Expired
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 Code Description Pages PDF
2003-02-28 TRNA Transmittal of New Application 1 View
2003-02-28 SPEC Specification 3 View
2003-02-28 DRW Drawings-only black and white line drawings 2 View
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Quick Facts
App. No.
60/451,235
Filed
2003-02-28