IP Library › Patent Application 60483102
Patent Application Provisional
App. No. 60/483,102 · Confirmation No. 9014

Method of simultaneous optimization for NA-delta exposure settings and scattering bars OPC using actual device layout

Provisional Application Expired
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 Code Description Pages PDF
2003-06-30 TRNA Transmittal of New Application 1 View
2003-06-30 SPEC Specification 2 View
2003-06-30 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/483,102
Filed
2003-06-30