Patent Application
Provisional
App. No. 60/483,106
· Confirmation No. 9006
Method for generating assist features utilizing an image intensity map
Inventor:
Kurt E. Wampler
Provisional Application Expired
Inventors
Kurt E. Wampler
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 55071-251
- Confirmation No.
- 9006
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/483,106
- Filed
- 2003-06-30
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