IP Library › Patent Application 60500260
Patent Application Provisional
App. No. 60/500,260 · Confirmation No. 6390

Model based placement of phase-balanced scattering bars to achieve lithography patterning requirements for sub-wavelength pitch features

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2003-09-05 TRNA Transmittal of New Application 1 View
2003-09-05 SPEC Specification 11 View
2003-09-05 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/500,260
Filed
2003-09-05