Patent Application
Provisional
App. No. 60/517,083
· Confirmation No. 7665
Model OPC implementation with generalized illumination
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-02-08 | CFILE |
Request for Corrected Filing Receipt | 3 | View | |
| 2003-11-05 | TRNA |
Transmittal of New Application | 1 | View | |
| 2003-11-05 | SPEC |
Specification | 5 | View | |
| 2003-11-05 | ARTIFACT |
Artifact sheet indicating an item has been filed which cannot be scanned | 1 | View | |
| 2003-11-05 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Xuelong Shi
Santa Clara, CA
Robert Socha
Santa Clara, CA
Thomas Laidig
Santa Clara, CA
Jang F. Chen
Santa Clara, CA
Doug Van Den Broeke
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 55071-306
- Confirmation No.
- 7665
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/517,083
- Filed
- 2003-11-05
External Links