Patent Application
Provisional
App. No. 60/530,656
· Confirmation No. 9507
Extending interference mapping to improve the depth of focus and exposure latitude
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-05-10 | CFILE |
Request for Corrected Filing Receipt | 5 | View | |
| 2005-04-05 | CFILE |
Request for Corrected Filing Receipt | 4 | View | |
| 2005-04-05 | LET. |
Miscellaneous Incoming Letter | 7 | View | |
| 2004-06-22 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2004-06-22 | CFILE |
Request for Corrected Filing Receipt | 2 | View | |
| 2003-12-19 | TRNA |
Transmittal of New Application | 1 | View | |
| 2003-12-19 | SPEC |
Specification | 10 | View | |
| 2003-12-19 | APPENDIX |
Appendix to the specification | 51 | View | |
| 2003-12-19 | APPENDIX |
Appendix to the specification | 7 | View | |
| 2003-12-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-12-19 | ARTIFACT |
Artifact sheet indicating an item has been filed which cannot be scanned | 1 | View |
Inventors
Robert John Socha
Santa Clara, CA
Douglas Van Den Broeke
Santa Clara, CA
Jang Fung Chen
Santa Clara, CA
Xuelong Shi
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 55071-305
- Confirmation No.
- 9507
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/530,656
- Filed
- 2003-12-19
External Links