Patent Application
Provisional
App. No. 60/530,662
· Confirmation No. 2996
Lithography illumination optimized with polarization
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-12-19 | TRNA |
Transmittal of New Application | 1 | View | |
| 2003-12-19 | SPEC |
Specification | 8 | View | |
| 2003-12-19 | APPENDIX |
Appendix to the specification | 27 | View | |
| 2003-12-19 | APPENDIX |
Appendix to the specification | 8 | View | |
| 2003-12-19 | APPENDIX |
Appendix to the specification | 23 | View | |
| 2003-12-19 | ARTIFACT |
Artifact sheet indicating an item has been filed which cannot be scanned | 1 | View | |
| 2003-12-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-12-19 | APPENDIX |
Appendix to the specification | 32 | View |
Inventors
Prosecution
- Docket No.
- 55071-304
- Confirmation No.
- 2996
Child
Claims priority from a provisional application
→
App. 12/773,775
· US 8,395,757
Filed 2010-05-04
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/921,878
· US 7,292,315
Filed 2004-08-20
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 11/907,648
· US 7,710,544
Filed 2007-10-16
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/530,662
- Filed
- 2003-12-19
External Links