IP Library › Patent Application 60539991
Patent Application Provisional
App. No. 60/539,991 · Confirmation No. 4206

Method of manufacturing reliability checking & verification for lithography process using a calibrated eigen decomposition model

Provisional Application Expired
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2005-03-08 CFILE Request for Corrected Filing Receipt 3 View
2004-01-30 TRNA Transmittal of New Application 1 View
2004-01-30 SPEC Specification 6 View
2004-01-30 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/539,991
Filed
2004-01-30