IP Library › Patent Application 60539997
Patent Application Provisional
App. No. 60/539,997 · Confirmation No. 4217

Method of predicting minimizing model OPC deviation due to mix/match exposure tools using a calibrated eigen decomposition model

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2008-09-04 PA.. Power of Attorney 2 View
2008-09-04 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2008-09-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-01-30 TRNA Transmittal of New Application 1 View
2004-01-30 SPEC Specification 5 View
2004-01-30 WFEE Fee Worksheet (SB06) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
60/539,997
Filed
2004-01-30