IP Library › Patent Application 60603560
Patent Application Provisional
App. No. 60/603,560 · Confirmation No. 3966

Method of model based scattering bars for enhanced depth of focus quarter-wavelength lithography

Provisional Application Expired
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 Code Description Pages PDF
2004-11-10 PA.. Power of Attorney 1 View
2004-08-24 TRNA Transmittal of New Application 1 View
2004-08-24 SPEC Specification 5 View
2004-08-24 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/603,560
Filed
2004-08-24