Patent Application
Provisional
App. No. 60/605,716
· Confirmation No. 6488
Vector eigen decomposition based OPC model
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-02-08 | CFILE |
Request for Corrected Filing Receipt | 3 | View | |
| 2005-01-07 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 4 | View | |
| 2004-12-15 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2004-08-31 | TRNA |
Transmittal of New Application | 1 | View | |
| 2004-08-31 | SPEC |
Specification | 10 | View |
Inventors
Xuelong Shi
Santa Clara, CA
Robert Socha
Santa Clara, CA
Thomas Laidig
Santa Clara, CA
J. Fung Chen
Santa Clara, CA
Doug Van Den Broeke
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20277
- Docket No.
- 55071-393
- Confirmation No.
- 6488
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/605,716
- Filed
- 2004-08-31
External Links