IP Library › Patent Application 60647433
Patent Application Provisional
App. No. 60/647,433 · Confirmation No. 8733

Use of elliptical 3D diffusion kernels for improved critical dimension calibration

Provisional Application Expired
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 Code Description Pages PDF
2005-01-28 TRNA Transmittal of New Application 1 View
2005-01-28 SPEC Specification 6 View
2005-01-28 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/647,433
Filed
2005-01-28