Patent Application
Provisional
App. No. 60/654,962
· Confirmation No. 3490
Full chip illumination for contact hole and via masks
Provisional Application Expired
Inventors
Robert J. Socha
Campbell, CA
Jang F. Chen
Cupertino, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20277
- Docket No.
- 55071-457
- Confirmation No.
- 3490
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/654,962
- Filed
- 2005-02-23
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