Patent Application
Provisional
App. No. 60/670,285
· Confirmation No. 8179
Double exposure lithography (DEL) techniques with mutual scattering bar trimming and polarization
Provisional Application Expired
Inventors
Jang Fung Chen
Santa Clara, CA
Duan-Fu Stephen Hsu
Santa Clara, CA
Douglas Van Den Broeke
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20277
- Docket No.
- 055071-0473
- Confirmation No.
- 8179
Child
Claims priority from a provisional application
→
App. 14/563,610
Filed 2014-12-08
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 11/402,273
· US 7,681,171
Filed 2006-04-12
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 12/691,552
· US 8,122,391
Filed 2010-01-21
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 13/401,820
· US 8,910,091
Filed 2012-02-21
· Patented Case
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/670,285
- Filed
- 2005-04-12
External Links