IP Library › Patent Application 60690586
Patent Application Provisional Small
App. No. 60/690,586 · Confirmation No. 7748

System and method of cleaning substrates using high frequency megasonics and/or cavitation control

Inventor: Ismail Kashkoush
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2005-06-15 TRNA Transmittal of New Application 1 View
2005-06-15 SPEC Specification 6 View
2005-06-15 CLM Claims 2 View
2005-06-15 DRW Drawings-only black and white line drawings 5 View
2005-06-15 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/690,586
Filed
2005-06-15