IP Library › Patent Application 60701810
Patent Application Provisional Small
App. No. 60/701,810 · Confirmation No. 9249

Method and apparatus for chemical deposition

Inventor: Chi-Hung Chang
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2005-07-22 TRNA Transmittal of New Application 2 View
2005-07-22 SPEC Specification 49 View
2005-07-22 DRW Drawings-only black and white line drawings 28 View
2005-07-22 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/701,810
Filed
2005-07-22