Patent Application
Provisional
App. No. 60/734,317
· Confirmation No. 4170
Method of generating OPC rules with interference mapping
Provisional Application Expired
Inventors
Douglas Van Den Broeke
Santa Clara, CA
Sangbong Park
Santa Clara, CA
Chung-Wei Hsu
Santa Clara, CA
Jang Fung Chen
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20277
- Docket No.
- 055071-0514
- Confirmation No.
- 4170
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/734,317
- Filed
- 2005-11-08
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