IP Library › Patent Application 60760820
Patent Application Provisional Small
App. No. 60/760,820 · Confirmation No. 2446

Backside cleaning of substrates

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2006-05-16 WFEE Fee Worksheet (SB06) 2 View
2006-05-11 PET.STATUS Petition for review/processing depending on status 4 View
2006-01-20 TRNA Transmittal of New Application 1 View
2006-01-20 SPEC Specification 6 View
2006-01-20 CLM Claims 2 View
2006-01-20 ABST Abstract 1 View
2006-01-20 DRW Drawings-only black and white line drawings 11 View
2006-01-20 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/760,820
Filed
2006-01-20