Patent Application
Provisional
App. No. 60/763,384
· Confirmation No. 4931
Method for decomposition of a customized DOE for use with a single exposure into a set of multiple exposures using less complex DOEs with optimized exposure settings
Provisional Application Expired
Inventors
Ting Chen
Chandler, AZ
Jang Fung Chen
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20277
- Docket No.
- 055071-0528
- Confirmation No.
- 4931
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/763,384
- Filed
- 2006-01-31
External Links