Patent Application
Provisional
App. No. 60/774,224
· Confirmation No. 3486
Method of multiple stages model calibration for optical proximity correction
Provisional Application Expired
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20277
- Docket No.
- 055071-0536
- Confirmation No.
- 3486
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/774,224
- Filed
- 2006-02-17
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