Patent Application
Provisional
App. No. 60/776,199
· Confirmation No. 1902
Method, program product and apparatus for model based geometry decomposition for use in a multiple exposure process
Inventor:
Robert John Socha
Provisional Application Expired
Inventors
Robert John Socha
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20277
- Docket No.
- 055071-0542
- Confirmation No.
- 1902
Child
Claims priority from a provisional application
→
App. 12/340,608
· US 8,060,842
Filed 2008-12-19
· Patented Case
Child
Claims priority from a provisional application
→
App. 13/244,127
· US 8,640,058
Filed 2011-09-23
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 11/496,742
· US 7,493,589
Filed 2006-08-01
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 60/776,199
- Filed
- 2006-02-24
External Links