Patent Application
Provisional
App. No. 60/789,560
· Confirmation No. 8337
Method of dark field double dipole lithography (DDL)
Provisional Application Expired
Inventors
Duan-Fu Stephen Hsu
Santa Clara, CA
Sangbong Park
Santa Clara, CA
Douglas Van Den Broeke
Santa Clara, CA
Jang Fung Chen
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20277
- Docket No.
- 055071-0554
- Confirmation No.
- 8337
Child
Claims priority from a provisional application
→
App. 12/890,494
· US 7,981,576
Filed 2010-09-24
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 11/783,261
· US 7,824,826
Filed 2007-04-06
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 13/155,259
· US 8,632,930
Filed 2011-06-07
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
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ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/789,560
- Filed
- 2006-04-06
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