IP Library › Patent Application 60818544
Patent Application Provisional
App. No. 60/818,544 · Confirmation No. 3293

Method of a multi-tone, CPL-type of PSM manufacturing process for blank materials with low etch selectivity

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2006-07-06 TRNA Transmittal of New Application 1 View
2006-07-06 SPEC Specification 8 View
2006-07-06 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/818,544
Filed
2006-07-06