IP Library › Patent Application 60857497
Patent Application Provisional
App. No. 60/857,497 · Confirmation No. 5383

Method of using calibrated pupil kernels to enhance lithography model calibration accuracy

Provisional Application Expired
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 Code Description Pages PDF
2006-11-24 APP.FILE.REC Filing Receipt 3 View
2006-11-08 TRNA Transmittal of New Application 1 View
2006-11-08 SPEC Specification 7 View
2006-11-08 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/857,497
Filed
2006-11-08