Patent Application
Provisional
Small
App. No. 61/089,744
· Confirmation No. 4898
Charged Particle Beam Lithography System and Target Positioning Device
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-09-09 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-08-18 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2008-08-18 | SPEC |
Specification | 16 | View | |
| 2008-08-18 | CLM |
Claims | 5 | View | |
| 2008-08-18 | ABST |
Abstract | 1 | View | |
| 2008-08-18 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2008-08-18 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-08-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Jerry Peijster
Maartensdijik, NETHERLANDS
Guido De Boer
Leerdam, NETHERLANDS
Attorneys & Agents of Record
Prosecution
- Customer No.
- 8791
- Docket No.
- 003531P030Z
- Confirmation No.
- 4898
Child
Claims priority from a provisional application
→
App. 13/298,152
· US 8,779,392
Filed 2011-11-16
· Patented Case
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Claims priority from a provisional application
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App. 14/585,829
· US 9,082,584
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· Patented Case
Child
Claims priority from a provisional application
→
App. 12/542,478
· US 8,796,644
Filed 2009-08-17
· Patented Case
Child
Claims priority from a provisional application
→
App. 14/221,204
· US 8,957,395
Filed 2014-03-20
· Patented Case
COURT APPOINTMENT
Recorded 2019-05-07
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Quick Facts
- App. No.
- 61/089,744
- Filed
- 2008-08-18
External Links