IP Library › Patent Application 61145871
Patent Application Provisional
App. No. 61/145,871 · Confirmation No. 8638

Conductive Seal Ring Electrostatic Chuck

Provisional Application Expired
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 Code Description Pages PDF
2009-02-10 APP.FILE.REC Filing Receipt 3 View
2009-01-20 TRNA Transmittal of New Application 2 View
2009-01-20 SPEC Specification 14 View
2009-01-20 CLM Claims 1 View
2009-01-20 DRW Drawings-only black and white line drawings 3 View
2009-01-20 WFEE Fee Worksheet (SB06) 2 View
2009-01-20 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/145,871
Filed
2009-01-20