IP Library › Patent Application 61306199
Patent Application Provisional
App. No. 61/306,199 · Confirmation No. 5672

Substrate Support Structure, Clamp Preparation Unit, and Lithography System

Provisional Application Expired
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 Code Description Pages PDF
2010-03-15 APP.FILE.REC Filing Receipt 3 View
2010-02-19 SPEC Specification 25 View
2010-02-19 CLM Claims 6 View
2010-02-19 ABST Abstract 1 View
2010-02-19 DRW Drawings-only black and white line drawings 11 View
2010-02-19 ADS Application Data Sheet 4 View
2010-02-19 WFEE Fee Worksheet (SB06) 2 View
2010-02-19 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/306,199
Filed
2010-02-19