IP Library › Patent Application 61310303
Patent Application Provisional
App. No. 61/310,303 · Confirmation No. 2196

SUBSTRATE SUPPORT STRUCTURE, CLAMP PREPARATION UNIT, AND LITHOGRAPHY SYSTEM

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2010-03-26 APP.FILE.REC Filing Receipt 3 View
2010-03-04 SPEC Specification 30 View
2010-03-04 CLM Claims 7 View
2010-03-04 ABST Abstract 1 View
2010-03-04 DRW Drawings-only black and white line drawings 11 View
2010-03-04 ADS Application Data Sheet 3 View
2010-03-04 WFEE Fee Worksheet (SB06) 2 View
2010-03-04 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/310,303
Filed
2010-03-04