Patent Application
Provisional
Small
App. No. 61/366,906
· Confirmation No. 3176
REMOTE PLASMA ASSISTED ATOMIC LAYER DEPOSITION
Inventor:
Sang In Lee
Provisional Application Expired
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2010-08-09 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-07-22 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2010-07-22 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2010-07-22 | SPEC |
Specification | 12 | View | |
| 2010-07-22 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-07-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Sang In Lee
Sunnyvale, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 758
- Docket No.
- 27276-16898
- Confirmation No.
- 3176
Child
Claims priority from a provisional application
→
App. 13/185,793
Filed 2011-07-19
· Abandoned -- After Examiner's Answer or Board of Appeals Decision
Child
PCT
Claims priority from a provisional application
→
PCT/US2010/050358
Filed 2010-09-27
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 12/890,504
Filed 2010-09-24
· Abandoned -- Failure to Respond to an Office Action
Child
PCT
Claims priority from a provisional application
→
PCT/US2011/044470
Filed 2011-07-19
· RO PROCESSING COMPLETED-PLACED IN STORAGE
RELEASE OF SECURITY INTEREST
Recorded 2012-03-29
SECURITY AGREEMENT
Recorded 2011-09-29
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Quick Facts
- App. No.
- 61/366,906
- Filed
- 2010-07-22
External Links