IP Library › Patent Application 61368442
Patent Application Provisional Small
App. No. 61/368,442 · Confirmation No. 9803

ROTATING REACTOR ASSEMBLY FOR ATOMIC LAYER DEPOSITION

Inventor: Sang In Lee
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2010-08-11 APP.FILE.REC Filing Receipt 3 View
2010-07-28 SPEC Specification 19 View
2010-07-28 DRW Drawings-only black and white line drawings 33 View
2010-07-28 TR.PROV Provisional Cover Sheet (SB16) 3 View
2010-07-28 WFEE Fee Worksheet (SB06) 2 View
2010-07-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/368,442
Filed
2010-07-28