IP Library Patent Application 61388367
Patent Application Provisional Small
App. No. 61/388,367 · Confirmation No. 7323

Apparatus and Method for Photolithographic Projection Exposure for Fabrication of One-, Two-, and Three-Dimensional Periodic Structures With or Without Integrated Patterns

Provisional Application Expired
⬇ PDF
Code Description Pages PDF
2010-10-21 APP.FILE.REC Filing Receipt 3 View
2010-09-30 TR.PROV Provisional Cover Sheet (SB16) 2 View
2010-09-30 SPEC Specification 13 View
2010-09-30 CLM Claims 1 View
2010-09-30 WFEE Fee Worksheet (SB06) 2 View
2010-09-30 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/388,367
Filed
2010-09-30