IP Library › Patent Application 61410796
Patent Application Provisional Small
App. No. 61/410,796 · Confirmation No. 8512

Vapor Deposition Reactor with Separate Remote-Plasma Reactors

Inventor: Sang In Lee
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2011-10-06 TRAN.LET Transmittal Letter 1 View
2011-10-06 SPEC Specification 13 View
2011-10-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-11-19 APP.FILE.REC Filing Receipt 3 View
2010-11-19 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2010-11-05 TR.PROV Provisional Cover Sheet (SB16) 3 View
2010-11-05 SPECNO Specification - Not in English 13 View
2010-11-05 WFEE Fee Worksheet (SB06) 2 View
2010-11-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/410,796
Filed
2010-11-05